Semiconductor clean room
· Filter · Semiconductor clean room
Chemical filter (Ecopro / M&E Corp products)
Designed for AMC control, which is a defect in semiconductor and FPD manufacturing processes
1.Application
Semiconductor, lcd emd ultra
precision manufacturing process
Odor and harmful gas generation industry
Areas requiring clean environment such as hospitals, museums and public
2.Features
High removal efficiency of over 90% and long lifetime
Customized filter creation based on customer request
Easy installation and operation through lightweight product
Excellent price competitiveness
Media type and target gas | ||
Media | Type | Target gas |
Acrivated carbon | For VOCs | Toluene, IPA |
Impregnated activated | For acids, bases, etc | HCI, SO₂, NO₂, NH₃, Amine, O₃ |
Anion exchange resin | For acids | HCI, SO₂, NO₂ |
Cation exchange resin | For bases | NH₃, Amine |