Semiconductor POU scrubber special filter
· Filter · Semiconductor POU scrubber special filter
Facility Photos (M&E Corp)
Used as process gas purification or POU scrubber and adsorption tower with catalyst for adsorption of harmful gas and adsorbent material.
Stable adsorption (chemisorption and decomposition)
Excellent adsorption capacity (the world’s best ammonia adsorption capacity)
Minimizing the pressure drop of the adsorbent
Maximization of gas distribution and minimization of channeling effect
Optimize adsorption size for specific process