Semiconductor clean room
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Semiconductor clean room

Chemical filter applied to clean room of semiconductor and display
Removal of harmful gases in clean rooms of advanced processes such as semiconductors and displays using adsorption materials
Effectively removes residual gases that cause defects to maintain clean environment and improve productivity
Specially treated adsorbent can be applied and customized design is possible depending on the target pollutant source
Applicable to fine chemicals, pharmaceutical manufacturing processes and industrial sites that generate odors and harmful gases