Adsorbent for semiconductor gas removal
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Adsorbent for semiconductor gas removal
Adsorbent to remove gas from semiconductor process
Various gases such as PFCs, N2O, Nox, VOCs and NH3 can be removed
Customized adsorbents for multicomponent mixed gases
High durability against temperature and humidity
Significantly eliminates harmful gases generated in semiconductors and LCD processes, improving yield and improving work environment
Applicable to various types of adsorbents