Adsorbent for semiconductor gas removal 2019-08-05T12:03:17+00:00

Adsorbent for semiconductor gas removal

· Material · Caterial · Adsorbent for semiconductor gas removal

Adsorbent for semiconductor gas removal

Adsorbent to remove gas from semiconductor process

Various gases such as PFCs, N2O, Nox, VOCs and NH3 can be removed

Customized adsorbents for multicomponent mixed gases

High durability against temperature and humidity

Significantly eliminates harmful gases generated in semiconductors and LCD processes, improving yield and improving work environment

Applicable to various types of adsorbents